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Chemical vapor deposition of superconducting Nb3Ge; experimental and thermodynamic studies

✍ Scribed by F. Weiss; R. Madar; J.P. Senateur; D. Boursier; C. Bernard; R. Fruchart

Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
538 KB
Volume
56
Category
Article
ISSN
0022-0248

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Thermodynamics and kinetics of initial gas phase reactions in chemical vapor deposition of titanium nitride. Theoretical study of TiCl4 ammonolysis
✍ Stanislav Ya. Umanskii; Konstantin P. Novoselov; Airat Kh. Minushev; Magdalena S πŸ“‚ Article πŸ“… 2001 πŸ› John Wiley and Sons 🌐 English βš– 204 KB

## Abstract Thermodynamic equilibrium and kinetics of the gas‐phase reaction between TiCl~4~ and NH~3~ have been studied computationally using results from recent quantum mechanical calculations of titanium tetrachloride ammonolysis.1 These calculations were based upon the transition state theory f