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Thermodynamic and experimental study of CVD of non-stoichiometric titanium nitride from TiCl4N2-H2mixtures

✍ Scribed by F. Teyssandier; C. Bernard; M. Ducarroir

Book ID: 105105177
Publisher: Springer
Year: 1988
Tongue: English
Weight: 672 KB
Volume: 23
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf01174044

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