Thermodynamic analysis of metalorganic chemical vapour deposition of SiC using tetramethylsilane as precursor. II. Influence of the minoritary tetramethylsilane pyrolysis byproducts in the preferred crystallization of SiC layers

✍ Scribed by V. Madigou; S. Veintemillas; R. Rodríguez-Clemente; A. Figueras; B. Armas; C. Combescure

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 361 KB
• Volume: 148
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)00646-6