Thermodynamic analysis of metalorganic chemical vapour deposition of SiC using tetramethylsilane as precursor. I. Identification of the main reactions

✍ Scribed by S. Veintemillas; V. Madigou; R. Rodríguez-Clemente; A. Figueras

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 463 KB
• Volume: 148
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)00645-8