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Thermochromic VO2 thin films deposited by HiPIMS

โœ Scribed by Fortier, J.-P.; Baloukas, B.; Zabeida, O.; Klemberg-Sapieha, J.E.; Martinu, L.


Book ID
122136595
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
726 KB
Volume
125
Category
Article
ISSN
0927-0248

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The novel physical vapor deposition called inverted cylindrical magnetron sputtering (also known as hollow cathode sputtering) is commonly used to coat wires, fibers, ribbons as well as all sides of three-dimensional substrates. It is a reproducible method for the production of nanostructured system