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Thermoanalytic studies of the pyrolysis of CpTiCl2N(SiMe3)2 and its use as a precursor for the chemical vapor deposition of titanium carbonitride

✍ Scribed by F. Laurent; J.S. Zhao; L. Valade; R. Choukroun; P. Cassoux

Book ID
107905748
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
737 KB
Volume
24
Category
Article
ISSN
0165-2370

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