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Thermally Induced Nano-Structural and Optical Changes of nc-Si:H Deposited by Hot-Wire CVD

✍ Scribed by C. J. Arendse; G. F. Malgas; T. F. G. Muller; D. Knoesen; C. J. Oliphant; D. E. Motaung; S. Halindintwali; B. W. Mwakikunga


Book ID
107470374
Publisher
Springer-Verlag
Year
2009
Tongue
English
Weight
315 KB
Volume
4
Category
Article
ISSN
1931-7573

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Effects of deposition pressure on the mi
✍ Peiqing Luo; Zhibin Zhou; Youjie Li; Shuquan Lin; Xiaoming Dou; Rongqiang Cui πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 474 KB

We report on the effects of deposition pressure P d on the growth and properties of the B-doped nanocrystalline silicon (nc-Si:H) thin films grown by hot-wire chemical vapor deposition (HWCVD) at very high hydrogen dilution of 98.8%. We found that the crystallinity of nc-Si:H or mc-Si:H films is not