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Thermally induced damages of PECVD SiNx thin films

✍ Scribed by Liu, Yinong; Jehanathan, Neerushana; Dell, John

Book ID: 118051436
Publisher: Cambridge University Press
Year: 2011
Tongue: English
Weight: 352 KB
Volume: 26
Category: Article
ISSN: 0884-2914
DOI: 10.1557/jmr.2011.236

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