๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Thermally excited silicon microactuators

โœ Scribed by Riethmuller, W.; Benecke, W.

Book ID
114535507
Publisher
IEEE
Year
1988
Tongue
English
Weight
674 KB
Volume
35
Category
Article
ISSN
0018-9383

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Three-dimensional silicon electrostatic
Three-dimensional silicon electrostatic linear microactuator
โœ N. Tirole; D. Hauden; P. Blind; M. Froelicher; L. Gaudriot ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 486 KB

In this paper, the fabrication of a three-dimensional (3D) silicon linear microactuator is described. This actuator is realized by anisotropic chemical etching of a (110)-oriented silicon wafer. The silicon monolithic structure of the microactuator comprises a fixed part bonded onto a glass substrat

Thermal cycle modeling of electrothermal
Thermal cycle modeling of electrothermal microactuators
โœ Mohammad Mayyas; Panos S. Shiakolas; Woo Ho Lee; Harry Stephanou ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 998 KB

A methodology for computing the transient heating (charging) and cooling (discharging) time for a serially connected electro thermo (E-T) microbeams actuator were analytically approximated from fundamental characteristics including input voltage, material and geometry. Specifically, this paper prese