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Powerful polymeric thermal microactuator with embedded silicon microstructure

✍ Scribed by Lau, G. K.; Goosen, J. F. L.; van Keulen, F.; Chu Duc, T.; Sarro, P. M.

Book ID: 120982344
Publisher: American Institute of Physics
Year: 2007
Tongue: English
Weight: 518 KB
Volume: 90
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2742599

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