Thermal switch design by using complementary metal??oxide semiconductor MEMS fabrication process

✍ Scribed by Jin-Chern Chiou; Lei-Chun Chou; You-Liang Lai; Ying-Zong Juang; Sheng-Chieh Huang

• Book ID: 114461588
• Publisher: The Institution of Engineering and Technology
• Year: 2011
• Tongue: English
• Weight: 367 KB
• Volume: 6
• Category: Article
• ISSN: 1750-0443
• DOI: 10.1049/mnl.2011.0122