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Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substrates

✍ Scribed by A. K. Sinha; H. J. Levinstein; T. E. Smith


Book ID
123617448
Publisher
American Institute of Physics
Year
1978
Tongue
English
Weight
448 KB
Volume
49
Category
Article
ISSN
0021-8979

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