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Thermal stability of supersaturated oxygen-doped silicon epitaxial films

✍ Scribed by A.E.M.J. Fischer; W.F.J. Slijkerman; J.F. Van Der Veen; I. Ohdomari


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
361 KB
Volume
44
Category
Article
ISSN
0169-4332

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