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Thermal stability of sputtered Mo/X and W/X (X = BN:O, B_4C:O, Si, and C) multiplayer soft-x-ray mirrors

✍ Scribed by Okada, Hisayuki ;Mayama, Kou ;Goto, Yoshinori ;Kusunoki, Isao ;Yanagihara, Mihiro

Book ID: 115343499
Publisher: The Optical Society
Year: 1994
Tongue: English
Weight: 751 KB
Volume: 33
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.33.004219

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