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Thermal stability of silicon nitride coatings produced by ion assisted deposition

โœ Scribed by K.S. Grabowski; A.D.F. Kahn; E.P. Donovan; C.A. Carosella


Book ID
113280163
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
525 KB
Volume
39
Category
Article
ISSN
0168-583X

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