Thermal stability of SiGe films on an ultra thin Ge buffer layer on Si grown at low temperature

✍ Scribed by Chengzhao Chen; Zhiwen Zhou; Yanghua Chen; Cheng Li; Hongkai Lai; Songyan Chen

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 917 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.04.076