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Thermal stability of Si/CoSi2 multiple layer systems

โœ Scribed by S. Schippel; A. Witzmann; J.K.N. Lindner


Book ID
113283524
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
307 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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