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Thermal stability of electrodeposited LIGA Ni–W alloys for high temperature MEMS applications

✍ Scribed by M. Haj-Taieb; A. S. M. A. Haseeb; J. Caulfield; K. Bade; J. Aktaa; K. J. Hemker


Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
539 KB
Volume
14
Category
Article
ISSN
0946-7076

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