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Thermal Stability and Performance of NbSiTaTiZr High-Entropy Alloy Barrier for Copper Metallization

✍ Scribed by Tsai, Ming-Hung; Wang, Chun-Wen; Tsai, Che-Wei; Shen, Wan-Jui; Yeh, Jien-Wei; Gan, Jon-Yiew; Wu, Wen-Wei

No coin nor oath required. For personal study only.

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