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Thermal stability and diffusion studies in the Au and Bi implanted AZ1350 photoresist

✍ Scribed by M. Behar; L. Amaral; F.C. Zawislak; R.B. Guimarães; D. Fink

Book ID: 113281137
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 346 KB
Volume: 46
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(90)90727-c

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