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Diffusion and solubility of Au implanted into the AZ1350 photoresist

✍ Scribed by M.R.F. Soares; J.R.A. Kaschny; J.H.R. dos Santos; L. Amaral; M. Behar; D. Fink


Book ID
114172206
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
134 KB
Volume
166-167
Category
Article
ISSN
0168-583X

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