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Thermal simulation of a micromachined thermopile-based thin-film gas flow sensor

✍ Scribed by U. Dillner; E. Kessler; S. Poser; V. Baier; J. Müller

Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
442 KB
Volume
29
Category
Article
ISSN
0026-2692

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