A selective CH4 sensor using semiconducting Ga2O3 thin films based on temperature switching of multigas reactions
✍ Scribed by Maximilian Fleischer; Hans Meixner
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 400 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0925-4005
No coin nor oath required. For personal study only.
✦ Synopsis
Ga,O, thin films have been developed as advantageous base materials for sensors to detect reducing gases. Due to the large operating temperature range of the sensors, a temperature-programmed setting of the gas sensitivity is possible. CH, detection at 420 "C demonstrates the known problems with metal-oxide gas detectors. At an operating temperature above 700 "C, the sensitivity towards other reducing gases and water diminishes, whereas there is a very strong CH, effect of about two orders of magnitude in conductance change. At a correct operating temperature, there is no significant effect resulting from the coadsorption of other reducing gases on the CH, sensor characteristics. Resistance values at this temperature have proven to be stable over several hundreds of hours, even in the case of continuous exposure to CH,.