Thermal relaxation behaviour of As in supersaturated Si studied by channeling, Hall effect measurements and transmission electron microscopy

✍ Scribed by Yusheng Wang; Jianhua Yan; Shengnan Zheng; Li Xu; Peihsin Tsien; Dongyan Hon; Huiwang Lin; Zhijian Li

• Book ID: 113277721
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 296 KB
• Volume: 15
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(86)90320-4