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Thermal oxidation of silicon in O2-SiF4 mixtures

✍ Scribed by G. Peev; T. Racheva; E. Dacheva; N. Nedev

Book ID: 108388856
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 238 KB
Volume: 169
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(89)80015-x

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