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Enhanced silicon oxidation in O2 and O2:F2

✍ Scribed by G.F. Cerofolini; G. La Bruna; L. Meda

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 976 KB
Volume: 89
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(95)00051-8

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