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Thermal Oxidation of Porous Silicon: Study on Reaction Kinetics

✍ Scribed by Pap, Andrea Edit; Kordás, Krisztián; George, Thomas F.; Leppävuori, Seppo

Book ID: 120360203
Publisher: American Chemical Society
Year: 2004
Tongue: English
Weight: 67 KB
Volume: 108
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp049323y

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