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Thermal oxidation of polycrystalline and single crystalline aluminum nitride wafers

✍ Scribed by Z. Gu; J. H. Edgar; S. A. Speakman; D. Blom; J. Perrin; J. Chaudhuri

Book ID
107453499
Publisher
Springer US
Year
2005
Tongue
English
Weight
799 KB
Volume
34
Category
Article
ISSN
0361-5235

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