Ellipsometric analysis of amorphous oxide film growth and crystalline oxide island development during thermal oxidation of aluminum

✍ Scribed by M. Badia

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 213 KB
• Volume: 13
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(72)90302-1