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Thermal oxidation of InAs and characterization of the oxide film

โœ Scribed by M. Yamaguchi; A. Yamamoto; H. Sugiura; C. Uemura

Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
450 KB
Volume
92
Category
Article
ISSN
0040-6090

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Changes in the thermal oxidation of zirconium due to the presence of an initial electrolyticallyformed oxide layer are studied. The increase in thickness of the oxide on heating is measured optically and gravimetrically. The effect of the initial layer is the same as if it had been produced thermall