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Thermal nitridation of silicon and silicon dioxide for thin gate insulators. Part I : Judith A. Nemetz and Richard E. Tressler. Solid St. Technol., 79 (February 1983)

Book ID: 103277723
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 130 KB
Volume: 23
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(83)90929-0

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