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Thermal nitridation of silicon and silicon dioxide for thin gate insulators. Part II : Judith A. Nemetz and Richard E. Tressler. Solid St. Technol. 209 (September 1983)

Book ID: 103276937
Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 132 KB
Volume: 24
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(84)90374-3

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