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Thermal molecular motion in polystyrene thin and ultrathin films by dynamic viscoelastic measurement

✍ Scribed by Akabori, Kei-ichi ;Tanaka, Keiji ;Nagamura, Toshihiko ;Takahara, Atsushi ;Kajiyama, Tisato


Book ID
107506779
Publisher
Chinese Electronic Periodical Services
Year
2007
Tongue
English
Weight
310 KB
Volume
14
Category
Article
ISSN
1005-9784

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Thermal conductivity (TC) of thin films will be influenced by boundary if the thickness is close to the mean free path (MFP). In this paper, we calculate the TC of crystalline and amorphous SiO 2 thin films, which are commonly used materials in micro devices and Integrated Circuits, by nonequilibriu