Thermal modeling of multilayer membranes for sensor applications
β Scribed by U. Dillner
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 680 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0924-4247
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Rapid thermal anneals (RTA) have been performed on boron and arsenic-implanted LPCVD polysilicon films. We have investigated the electrical properties of highly implanted films (4 x 1014, 8 x lOI and 5 x 10" cm-') using Hall techniques. The experimental results are compared with those obtained on co
Selective transport of given substrates through artificial membranes can be achieved by incorporation of electrically neutral or charged carriers. Such mediated transport described for alkali and alkaline-earth metal cations is reported here for the first time for certain anions using cobyrinate-typ