𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Applications of a model for silicon resonant sensors

✍ Scribed by Albert Prak; Jan H.J. Fluitman


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
394 KB
Volume
41
Category
Article
ISSN
0924-4247

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Fabrication and characterization of a sh
✍ Gunjana Sharma; Lina Liljeholm; Johannes Enlund; Johan BjurstrΓΆm; Ilia Katardjie πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 684 KB

A shear mode AlN solidly mounted resonator (SMR) microfluidic sensor system was fabricated and characterized. The AlN SMR fabrication process is fully IC compatible and uses reactive sputtering to deposit piezoelectric AlN thin films with a non-zero mean inclination of the c-axis, which allows in-li