Thermal Leakage Improvement by Using a High-Work-Function Ni Electrode in High-κ TiHfO Metal–Insulator–Metal Capacitors

✍ Scribed by Chiang, K. C.; Huang, C. C.; Pan, H. C.; Hsiao, C. N.; Lin, J. W.; Hsieh, I. J.; Cheng, C. H.; Chou, C. P.; Chin, A.; Hwang, H. L.; McAlister, S. P.

• Book ID: 121852955
• Publisher: The Electrochemical Society
• Year: 2007
• Tongue: English
• Weight: 533 KB
• Volume: 154
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.2422874