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Thermal Decomposition Studies of Organoplatinum Films

✍ Scribed by Fan, Yongchang ;Davidson, Marcus R. ;Cairns, James A. ;Berry, Graham J. ;Fitzgerald, Alexander G.

Publisher
Springer-Verlag
Year
2002
Weight
315 KB
Volume
139
Category
Article
ISSN
0344-838X

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The mechanism of silane thermal decomposition is investigated in a flow reactor. The time dependencies of silane consumption and disilane formation were compared with those parameters of solid product (aerosol particles) such as concentration, total hydrogen content in solid product, and fraction of