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Thermal decomposition of silane

✍ Scribed by Gordon, Mark S.; Gano, David R.; Binkley, J. Stephen.; Frisch, Michael J.

Book ID
126052321
Publisher
American Chemical Society
Year
1986
Tongue
English
Weight
548 KB
Volume
108
Category
Article
ISSN
0002-7863

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The mechanism of silane thermal decomposition is investigated in a flow reactor. The time dependencies of silane consumption and disilane formation were compared with those parameters of solid product (aerosol particles) such as concentration, total hydrogen content in solid product, and fraction of