Studying of silane thermal decomposition
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A. A. Onischuk; V. P. Strunin; M. A. Ushakova; V. N. Panfilov
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Article
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1998
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John Wiley and Sons
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English
โ 243 KB
๐ 2 views
The mechanism of silane thermal decomposition is investigated in a flow reactor. The time dependencies of silane consumption and disilane formation were compared with those parameters of solid product (aerosol particles) such as concentration, total hydrogen content in solid product, and fraction of