𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Thermal Conductivity Measurements of Thin Amorphous Silicon Films by Scanning Thermal Microscopy

✍ Scribed by S. Volz; X. Feng; C. Fuentes; P. Guérin; M. Jaouen


Book ID
110399011
Publisher
Springer
Year
2002
Tongue
English
Weight
211 KB
Volume
23
Category
Article
ISSN
0195-928X

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Thermal conductivity of amorphous and cr
✍ Zhengxing Huang; Zhenan Tang; Jun Yu; Suyuan Bai 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 520 KB

Thermal conductivity (TC) of thin films will be influenced by boundary if the thickness is close to the mean free path (MFP). In this paper, we calculate the TC of crystalline and amorphous SiO 2 thin films, which are commonly used materials in micro devices and Integrated Circuits, by nonequilibriu