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Thermal Conductivity Measurement of Low-kDielectric Films: Effect of Porosity and Density

✍ Scribed by Alam, M. T.; Pulavarthy, R. A.; Bielefeld, J.; King, S. W.; Haque, M. A.

Book ID
121436036
Publisher
Springer US
Year
2013
Tongue
English
Weight
789 KB
Volume
43
Category
Article
ISSN
0361-5235

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