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Thermal conductivity of low-k films of varying porosity and direct measurements on silicon substrate

✍ Scribed by M. Kuwahara; O. Suzuki; S. Takada; N. Hata; P. Fons; J. Tominaga

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 220 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.12.030

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