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Thermal conductivity measurement of amorphous Si/SiGe multilayer films by 3 omega method

✍ Scribed by Shen, Binjie; Zeng, Zhigang; Lin, Cong; Hu, Zhiyu

Book ID: 120041930
Publisher: Elsevier Science
Year: 2013
Tongue: French
Weight: 653 KB
Volume: 66
Category: Article
ISSN: 1290-0729
DOI: 10.1016/j.ijthermalsci.2012.10.022

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