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Thermal Annealing of Fluorocarbon Films Grown by Hot Filament Chemical Vapor Deposition

✍ Scribed by Lau, Kenneth K. S.; Gleason, Karen K.


Book ID
126202471
Publisher
American Chemical Society
Year
2001
Tongue
English
Weight
204 KB
Volume
105
Category
Article
ISSN
0022-3654

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