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Thermal actuation of thin film microelectromechanical structures

✍ Scribed by J. Gaspar; V. Chu; N. Louro; R. Cabeça; J.P. Conde


Book ID
117145551
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
151 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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