Failure Analysis of Thermal Actuators, Comb Drives, and Other Microelectromechanical Elements

✍ Scribed by T. F. Tan; K. Weber; C. K. H. Dharan

• Book ID: 107462619
• Publisher: Springer US
• Year: 2007
• Tongue: English
• Weight: 385 KB
• Volume: 7
• Category: Article
• ISSN: 1547-7029
• DOI: 10.1007/s11668-007-9018-4