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[IEEE 2011 National Postgraduate Conference (NPC) - Perak, Malaysia (2011.09.19-2011.09.20)] 2011 National Postgraduate Conference - Theoretical analysis of resonant lateral electrostatic Comb drive actuator and sensor

✍ Scribed by Ahmad, Farooq; Khir, Mohd Haris Md; Hamid, Nor Hisham; Dennis, John Ojur

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