Theory of elastic and inelastic scattering of electrons emitted from solids: Energy spectra and depth profiling in XPS/AES
โ Scribed by Arne L. Tofterup
- Publisher
- Elsevier Science
- Year
- 1986
- Weight
- 59 KB
- Volume
- 167
- Category
- Article
- ISSN
- 0167-2584
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๐ SIMILAR VOLUMES
Elastic electron scattering in XPS and AES vary considerably with depth of origin of emitted electrons. To account for this, we introduced in a recent paper a simple correction factor CF. The function CF is the ratio of emitted peak intensity from a layer of atoms located at a given depth in a solid
Quantitative Auger electron spectroscopy (AES) and x-ray photoelectron spectroscopy (XPS) depend on an accurate knowledge of the correct depth scale of emission of the signal electrons. This depends on both inelastic and elastic scattering processes occurring in the specimen under analysis. A previ