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Theoretical study of the interactions of SiH[sub 2] radicals with silicon surfaces

✍ Scribed by Ramalingam, Shyam; Mahalingam, Pushpa; Aydil, Eray S.; Maroudas, Dimitrios

Book ID
120558147
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
753 KB
Volume
86
Category
Article
ISSN
0021-8979

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