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Theoretical study of acoustic band-gap structures made of porous silicon

✍ Scribed by Reinhardt, A. ;Snow, P. A.

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 421 KB
Volume: 204
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200674415

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✦ Synopsis

Abstract

In this paper, we discuss the acoustic properties of porous silicon and outline the differences and similarities of the behaviour of elastic and light waves in mesoporous porous silicon etched in p^+^‐type silicon wafers. We then investigate the expected acoustic characteristics of distributed Bragg mirrors and rugate filters obtained by a modulation of porosity with depth. In particular, we emphasize some features these mirrors exhibit when compared to the optical equivalents in pSi. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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